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[IEEE 2001 IEEE International SOI Conference. Proceedings - Durango, CO, USA (1-4 Oct. 2001)] 2001 IEEE International SOI Conference. Proceedings (Cat. No.01CH37207) - Study of relevance of the SIMOX defect type on yield of radiation-tolerant device test structures
Anc, M.J., Allen, L.P., Alles, M.L., Dolan, R.P., Liu, S.T., Sullwold, J.G., Gostein, M., Banet, M.Year:
2001
Language:
english
DOI:
10.1109/soic.2001.958020
File:
PDF, 220 KB
english, 2001