Improved Drive Current in RF Vertical MOSFETS Using Hydrogen Anneal
Hakim, M. M. A., Abuelgasim, A., Tan, L., de Groot, C. H., Redman-White, W., Hall, S., Ashburn, P.Volume:
32
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2010.2101042
Date:
March, 2011
File:
PDF, 222 KB
english, 2011