[Japan Soc. Appl. Phys 1999 Symposium on VLSI Technology....

[Japan Soc. Appl. Phys 1999 Symposium on VLSI Technology. Digest of Technical Papers - Kyoto, Japan (14-16 June 1999)] 1999 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.99CH36325) - A reliable 0.1 μm Ta/sub 2/O/sub 5/ transistor manufactured with an almost standard CMOS process

Devoivre, T., Papadas, C., Setton, M.

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Year:

1999

Language:

english

DOI:

10.1109/vlsit.1999.799378

File:

PDF, 173 KB

english, 1999

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