Simple Removal Technology of Chemically Stable Polymer in...

Journal of Microelectromechanical Systems 2013 / 02 Vol. 22; Iss. 1

Simple Removal Technology of Chemically Stable Polymer in MEMS Using Ozone Solution

Yoshida, Shinya, Yanagida, Hideaki, Esashi, Masayoshi, Tanaka, Shuji
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Volume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2217374
Date:
February, 2013
File:
PDF, 1.54 MB
english, 2013
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