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[IEEE IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Boston, MA, USA (21-23 Oct. 1991)] [1991 Proceedings] IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Cost of ownership for advanced optical lithography
DiSessa, P., Stone, S.Year:
1991
Language:
english
DOI:
10.1109/asmc.1991.167383
File:
PDF, 851 KB
english, 1991