[IEEE 1997 IEEE/SEMI Advanced Semiconductor Manufacturing...

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[IEEE 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings - Cambridge, MA, USA (10-12 Sept. 1997)] 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings - Process trends for DPS metal etch: a case study for Al-1%Cu logic devices

Carel, R., Blackley, W.S., Thompson, E.E., Chen, J.
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Year:
1997
Language:
english
DOI:
10.1109/asmc.1997.630743
File:
PDF, 504 KB
english, 1997
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