Study on the etching damage characteristics of PZT thin...

Microelectronic Engineering 2004 Vol. 71; Iss. 3-4

Study on the etching damage characteristics of PZT thin films after etching in Cl-based plasma

Kyoung-Tae Kim, Myoung-Gu Kang, Chang-Il Kim
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Volume:
71
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2004.02.001
File:
PDF, 244 KB
english, 2004
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