Microstructure and characteristics of the HfO2 dielectric layers grown by metalorganic molecular beam epitaxy
Jang-Hyuk Hong, Tae-Hyoung Moon, Jae-Min MyoungVolume:
75
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2004.05.008
File:
PDF, 350 KB
english, 2004