Ramifications of lubrication theory on imprint lithography
Matthew Colburn, Byung Jin Choi, S.V. Sreenivasan, Roger T. Bonnecaze, C. Grant WillsonVolume:
75
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.mee.2004.05.010
File:
PDF, 294 KB
english, 2004