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Effect of the Addition of Acrylic Monomers on Mechanical Properties of Patterns Applied in Negative-Type Photoresists
Huang, Hsin-Yi, Chen, HuiVolume:
524
Language:
english
Journal:
Molecular Crystals and Liquid Crystals
DOI:
10.1080/15421406.2010.484609
Date:
June, 2010
File:
PDF, 481 KB
english, 2010