Cu surface treatment influence on Si adsorption properties of CuSiN self-aligned barriers for sub-65 nm technology node
S. Chhun, L.G. Gosset, J. Michelon, V. Girault, J. Vitiello, M. Hopstaken, S. Courtas, C. Debauche, P.H.L. Bancken, N. Gaillard, G. Bryce, M. Juhel, L. Pinzelli, J. Guillan, R. Gras, B. Van SchravendiVolume:
83
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2006.09.013
File:
PDF, 901 KB
english, 2006