CMP characteristics and optical property of ITO thin film...

Microelectronic Engineering 2006 Vol. 83; Iss. 11-12

CMP characteristics and optical property of ITO thin film by using silica slurry with a variety of process parameters

Gwon-Woo Choi, Kang-Yeon Lee, Nam-Hoon Kim, Jin-Seong Park, Yong-Jin Seo, Woo-Sun Lee
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Volume:
83
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2006.10.006
File:
PDF, 226 KB
english, 2006
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