Integrating ENSEMBLE™ PMD low-k at the PMD level of CMOS...

Microelectronic Engineering 2006 Vol. 83; Iss. 11-12

Integrating ENSEMBLE™ PMD low-k at the PMD level of CMOS logic circuits

S. Demuynck, J.F. de Marneffe, Q.T. Le, I. Vos, K. Devriendt, M. Van Hove, J. Waeterloos, K. Howard, P. Popa, L. Wilson, L. Mills
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Volume:
83
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2006.10.023
File:
PDF, 870 KB
english, 2006
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