A new way of manufacturing high resolution optical encoders by nanoimprint lithography
S. Merino, A. Retolaza, A. Juarros, S. LandisVolume:
84
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2007.01.024
File:
PDF, 1.77 MB
english, 2007