Piezoresistive accelerometers for MCM-package - Part II:The...

Piezoresistive accelerometers for MCM-package - Part II:The packaging

Cabruja, E., Collado, A., Plaza, J.A., Esteve, J.
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Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.845456
Date:
August, 2005
File:
PDF, 735 KB
english, 2005
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