Fine-tuning of GaAs photonic crystal cavities by digital etching
T. Sünner, R. Herrmann, A. Löffler, M. Kamp, A. ForchelVolume:
84
Year:
2007
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2007.01.064
File:
PDF, 283 KB
english, 2007