The UV-nanoimprint lithography equipment with multi-head...

Microelectronic Engineering 2007 Vol. 84; Iss. 5-8

The UV-nanoimprint lithography equipment with multi-head imprinting unit for sub-50 nm half-pitch patterns

JaeJong Lee, KeeBong Choi, GeeHong Kim, SeungWoo Lee
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Volume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.01.079
File:
PDF, 882 KB
english, 2007
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