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Fabrication of RF-MEMS switches on LTCC substrates using PECVD a-Si as sacrificial layer
E. Cianci, A. Coppa, V. Foglietti, M. Dispenza, R. Buttiglione, A.M. Fiorello, R. Marcelli, S. Catoni, D. PochesciVolume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.01.096
File:
PDF, 483 KB
english, 2007