Thermal imprint lithography using sub-micron sized nickel...

Microelectronic Engineering 2007 Vol. 84; Iss. 5-8

Thermal imprint lithography using sub-micron sized nickel template coated with thin SiO2 layer

Kyeong-Jae Byeon, Ki-Yeon Yang, Heon Lee
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Volume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.01.102
File:
PDF, 669 KB
english, 2007
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