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Fingerprint stamp for evaluation of polymer flow time constants in thermal nanoimprint
H.-C. Scheer, N. Bogdanski, S. Möllenbeck, M. Wissen, K. Zimmer, J. ZajadaczVolume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.01.121
File:
PDF, 364 KB
english, 2007