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Observation of the internal defects of multilayer film
H. Kinoshita, K. Hamamoto, N. Sakaya, M. Hosoya, T. Shoki, Y. Mizuta, T. Yoshizumi, K. Tanaka, T. WatanabeVolume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.01.139
File:
PDF, 520 KB
english, 2007