Fabrication of a nano-scale NAND memory array based on a SONOS Fin-FET cell using e-beam lithography and hydrogen-silsesquioxane resist
Tarek Lutz, Michael Specht, Lothar Risch, Christoph Friederich, Lars Dreeskornfeld, Johannes Kretz, Walter Weber, Wolfgang RösnerVolume:
84
Year:
2007
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2007.01.255
File:
PDF, 289 KB
english, 2007