Plasma doping induced damages associated with source/drain...

Plasma doping induced damages associated with source/drain formation in three-dimensional beam-channel MOS transistor

Kei Kobayashi, Kiyoshi Okuyama, Hideo Sunami
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.01.259
File:
PDF, 626 KB
english, 2007
Conversion to is in progress
Conversion to is failed