Study on the surface roughness of substrate with...

Microelectronic Engineering 2007 Vol. 84; Iss. 5-8

Study on the surface roughness of substrate with multi-fractal spectrum

Shuyi Gan, Qing Zhou, Xiangdong Xu, Yilin Hong, Yin Liu, Shaojun Fu
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Volume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.01.273
File:
PDF, 321 KB
english, 2007
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