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Extraction of gate-edge workfunction of metal gate and its impact on scaled MOSFETs
N. Mise, T. Matsuki, T. Watanabe, T. Eimori, Y. NaraVolume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.04.040
File:
PDF, 11.00 MB
english, 2007