Low temperature RTP for BCB curing
Michel Ouaknine, Igor J. Malik, Masato Odera, Toshikazu Ishigaki, Takeshi Ueda, Takashi Fukada, Woo Sik Yoo, Philippe Soussan, Philippe MullerVolume:
84
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2007.05.033
File:
PDF, 395 KB
english, 2007