Determination of stress build-up during nanoimprint process...

Microelectronic Engineering 2008 Vol. 85; Iss. 5-6

Determination of stress build-up during nanoimprint process in triangular polymer structures

I. Fernandez-Cuesta, X. Borrisé, A. Retolaza, S. Merino, D.-A. Mendels, O. Hansen, A. Kristensen, F. Pérez-Murano
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Volume:
85
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.11.012
File:
PDF, 538 KB
english, 2008
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