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Etching of sub-micrometer structures through Stencil
G. Villanueva, O. Vazquez-Mena, M.A.F. van den Boogaart, K. Sidler, K. Pataky, V. Savu, J. BruggerVolume:
85
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2007.12.068
File:
PDF, 1.37 MB
english, 2008