Stochastic simulation studies of molecular resists for the...

Stochastic simulation studies of molecular resists for the 32 nm technology node

D. Drygiannakis, G.P. Patsis, N. Tsikrikas, G. Kokkoris, A. Boudouvis, I. Raptis, E. Gogolides, P. Argitis
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Volume:
85
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2007.12.072
File:
PDF, 546 KB
english, 2008
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