Fast thermal nanoimprint lithography by a stamp with integrated heater
Massimo Tormen, Radu Malureanu, Rasmus Haugstrup Pedersen, Lasse Lorenzen, Kristian Hagsted Rasmussen, Christopher James Lüscher, Anders Kristensen, Ole HansenVolume:
85
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2008.01.065
File:
PDF, 655 KB
english, 2008