Hybrid EB-writing technique with 100 kV-SB and...

Microelectronic Engineering 2008 Vol. 85; Iss. 7

Hybrid EB-writing technique with 100 kV-SB and 50 kV-VSB writers: Use of the former for outlines and the latter for bodies after pattern data splitting

Hiroshi Fujita, Mikio Ishikawa, Naoko Kuwahara, Masaharu Fukuda, Masashi Sakaki, Tadahiko Takikawa, Hisatake Sano, Morihisa Hoga, Naoya Hayashi
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Volume:
85
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2008.02.012
File:
PDF, 1.45 MB
english, 2008
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