Porosity generation using hydrogen plasma assisted thermal curing for ultra low k material
A. Zenasni, V. Jousseaume, O. Gourhant, L. Favennec, P. MauryVolume:
85
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2008.04.044
File:
PDF, 268 KB
english, 2008