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Toward the integration of a single carbon nanofibre as via interconnect
J.C. Coiffic, H. Le Poche, D. Mariolle, N. Chevalier, S. Olivier, M. Fayolle, S. MaitrejeanVolume:
85
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2008.04.050
File:
PDF, 565 KB
english, 2008