Interface optimization for poly silicon/tungsten gates
Sven Schmidbauer, Jens Hahn, Axel Buerke, Frank Jakubowski, Olaf Storbeck, Yu-Wei Ting, Thomas Schuster, Jürgen FaulVolume:
85
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2008.07.010
File:
PDF, 625 KB
english, 2008