Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials – An adaptive calibration algorithm
Scholz, P., Herfurth, N., Sadowski, M., Lundquist, T., Kerst, U., Boit, C.Volume:
54
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2014.07.062
Date:
September, 2014
File:
PDF, 1.28 MB
english, 2014