Memory characteristics of MOSFET with silicon nanoclusters formed using a pulse-type gas-feeding technique in the LPCVD system
Eunkyeom Kim, Kyoungmin Kim, Daeho Son, Jeongho Kim, Sunghwan Won, Wan-Shick Hong, Junghyun Sok, Kyoungwan ParkVolume:
85
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2008.09.041
File:
PDF, 428 KB
english, 2008