Improved etching method for microelectronic devices with supercritical carbon dioxide
Jae Hyun Bae, Md. Zahangir Alam, Jae Mok Jung, Yeong-Soon Gal, Hyosan Lee, Hyun Gyu Kim, Kwon Taek LimVolume:
86
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2008.10.003
File:
PDF, 350 KB
english, 2009