Fabrication of beam resonators from hot-wall chemical...

Microelectronic Engineering 2009 Vol. 86; Iss. 4-6

Fabrication of beam resonators from hot-wall chemical vapour deposited SiC

Enrico Mastropaolo, Rebecca Cheung, Anne Henry, Erik Janzén
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Volume:
86
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2008.11.016
File:
PDF, 410 KB
english, 2009
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