Using electron and ion beams on carbon nanotube-based...

Microelectronic Engineering 2009 Vol. 86; Iss. 4-6

Using electron and ion beams on carbon nanotube-based devices. Effects and considerations for nanofabrication

G. Rius, J. Llobet, M.J. Esplandiu, L. Solé, X. Borrisé, F. Pérez-Murano
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Volume:
86
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2008.12.007
File:
PDF, 692 KB
english, 2009
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