Durability of antisticking layer against heat in nanoimprinting evaluated using scanning probe microscopy
Makoto Okada, Masayuki Iwasa, Ken-ichiro Nakamatsu, Kazuhiro Kanda, Yuichi Haruyama, Shinji MatsuiVolume:
86
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2008.12.054
File:
PDF, 516 KB
english, 2009