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Large area nanosize array stamp for UV-based nanoimprint lithography fabricated by size reduction process
Xiaoli Li, Qingkang Wang, Jing Zhang, Weimin Zhou, Yanbo Liu, Yongzhong Wan, Xiaoming NiuVolume:
86
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2008.12.090
File:
PDF, 626 KB
english, 2009