Fabrication of enclosed nanofluidic channels by UV cured...

Microelectronic Engineering 2009 Vol. 86; Iss. 4-6

Fabrication of enclosed nanofluidic channels by UV cured imprinting and optimized thermal bonding of SU-8 photoresist

Xudi Wang, Liangjin Ge, Jingjing Lu, Xiaojun Li, Keqiang Qiu, Yangchao Tian, Shaojun Fu, Zheng Cui
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Volume:
86
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2009.01.070
File:
PDF, 325 KB
english, 2009
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