Reversal μCP using hard stamps

Microelectronic Engineering 2009 Vol. 86; Iss. 4-6

Reversal μCP using hard stamps

Iris Bergmair, Michael Mühlberger, Wolfgang Schwinger, Kurt Hingerl, Ernst Bernhard Kley, Holger Schmidt, Rainer Schöftner
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Volume:
86
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2009.02.020
File:
PDF, 472 KB
english, 2009
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