A study of deposition conditions on charging properties of PECVD silicon nitride films for MEMS capacitive switches
Koutsoureli, M., Michalas, L., Gantis, A., Papaioannou, G.Volume:
54
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2014.08.002
Date:
September, 2014
File:
PDF, 864 KB
english, 2014