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Microfabrication of a nickel mold insert by a modified deep X-ray lithography process and its application to hot embossing
Bong-Kee Lee, Jong Hyun Kim, Dong Sung Kim, Suk Sang Chang, Tai Hun KwonVolume:
87
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2010.04.023
File:
PDF, 941 KB
english, 2010