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Improvement of Ni/Si/4H-SiC ohmic contacts by VLS grown sub-contact layer
Petr Macháč, Bohumil BardaVolume:
87
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2010.05.012
File:
PDF, 483 KB
english, 2010