Phase formation and texture of nickel silicides on Si1−xCx...

Microelectronic Engineering 2011 Vol. 88; Iss. 5

Phase formation and texture of nickel silicides on Si1−xCx epilayers

K. De Keyser, B. De Schutter, C. Detavernier, V. Machkaoutsan, M. Bauer, S.G. Thomas, J. Jordan Sweet, C. Lavoie
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Volume:
88
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2010.06.010
File:
PDF, 1.72 MB
english, 2011
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