Young’s modulus evaluation by SAWs for porous silica low-k film with cesium doping
X. Xiao, X.M. Shan, Y. Kayaba, K. Kohmura, H. Tanaka, T. KikkawaVolume:
88
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2010.06.013
File:
PDF, 502 KB
english, 2011