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High density, low leakage Back-End 3D capacitors for mixed signals applications
M. Detalle, M. Barrenetxea, P. Muller, G. Potoms, A. Phommahaxay, P. Soussan, K. Vaesen, W. De RaedtVolume:
87
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2010.07.020
File:
PDF, 1.15 MB
english, 2010