Simulation and verification of void transfer patterning...

Simulation and verification of void transfer patterning (VTP) technique for nm-scale features

Guriqbal Singh Josan, Archana Devasia, Sean Rommel, Santosh K. Kurinec
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Volume:
88
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2010.08.020
File:
PDF, 1.56 MB
english, 2011
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